RAYLASE

SUPERSCAN IIE 2Dガルバノスキャナデモ機有

SUPERSCAN IIE 2Dガルバノスキャナ

The innovative thermal management and modular design make the SUPERSCAN IIE the perfect deflection unit for demanding laser applications.

The "enhanced" option offers a 50 % better long-term drift performance.

Long-term drift can even be further minimized by an additional water tempering.


特長

  • Lowest drift values through twin-shell design
  • Suitable for high power applications
  • Water tempering and air flushing options
  • "enhanced" option for 50 % improved long-term drift
  • Available apertures (mm): 7, 10, 12, 15, 20, 30

インターフェイス

The deflection units are compatible to the XY2-100 standard protocol.
They can be digitally controlled by a control card, such as the SP-ICE-1 PCIe PRO.


ミラーとレンズ

Scan mirrors and objectives with optimized mounts are available for all typical laser types,
wavelengths, power densities, focal lengths and working fields. Customer specific configurations are also possible.

GENERAL SPECIFICATIONS

Power supply Voltage ±15 to ±18 V
Current 3 A, RMS, max. 10 A
Ripple / Noise Max. 200 mVpp,
@ 20 MHz bandwidth
Interface signals Digital XY2-100 Protocol
Ambient temperature +15 to +35 °C
Storage temperature -10 to +60 °C
Humidity ≤ 80 % non-condensing

 

Temperature Drift Max. Gaindrift ¹ < 15 ppm/K
Max. Offsetdrift ¹ < 10 μrad/K
Typical deflection (optical) ± 0.393 rad
Resolution optically 12 µrad
Repeatability (RMS) 2 µrad
Long-term Drift 8 h 1, 2 < 150 µrad
Long-term Drift 8 h water tempering 1, 3 < 100 µrad
Position noise (RMS) < 10 µrad

1. Drift per axis.
2. After 30 min warm-up, at constant ambient temperature and process stress.
3. After 30 min warm-up, under varying process loads, with water temperature control set for ≥ 2 l/min and 22 ̊C water temperature.


APERTURE DEPENDENT SPECIFICATIONS – MECHANICAL DATA

Deflection unit SS-IIE-7 SS-IIE-10 SS-IIE-12 SS-IIE-15 SS-IIE-20 SS-IIE-20 L SS-IIE-30
Input aperture (mm) 7 10 12 15 20 20 30
Beam displace-
ment (mm)
9.0 12.4 14.0 18.55 / 18.05 1 26.28 / 25.63 1 26.28 / 25.63 1 35.82 / 35.38 1
Weight (without
objective) (kg)
approx. 1.6 approx. 3.3 approx. 3.3 approx. 3.3 approx. 3.3 approx. 5.9 approx. 5.9
Dimension
(LxWxH) (mm)
135 x 97 x 102.0 170 x 125 x 117.5 170 x 125 x 117.5 170 x 125 x 117.5 170 x 125 x 117.5 203 x 159 x 150/160.5 2 203 x 159 x 150/160.5 2
Water Tempering
Option
 
Air Flushing Option          

1. Specification for fused Silica mirrors.
2. AXIALSCAN variation only, additional output plate for protection window.


APERTURE DEPENDENT SPECIFICATIONS – MIRROR VARIATIONS

deflection unit  SS-IIE-7 SS-IIE-10  SS-IIE-12  SS-IIE-15  SS-IIE-20  SS-IIE-30 
355 nm  SI  SI  SI  QU, SI  QU 
532 nm  SI  SI  SI  QU, SI, BE  QU, SI, BE  QU 
780-980 nm + AL      QU  QU  QU 
1,064 nm  SI  SI  SI  QU, SI, BE  QU, SI, BE  QU, SI, SC, BE 
900-1,100 nm + AL        SC 
1,060-1,080 nm      QU, SC 
10,600 nm  SI  SI  SI  SI, BE  SI, BE  SI, SC, BE 

tandard: QU = Quartz (Fused Silica), SI = Silicon, High Speed: SC = Silicon carbide


T YPE DEPENDENT SPECIFICATIONS – DYNAMIC DATA

deflection unit  SS-II E-7 SS-II E-10  SS-IIE-12  SS-IIE-15
Mirror type  SI  SI  SI  QU  SI SC
Acceleration time (ms)  0.19  0.19  0.25  0.36  0.30 0.24
writing speed (cps) (1, 2)  1,000 800 650 435 500 615
Positioning speed (m/s) (1)  15 10 9 6 7 9
deflection unit  SS-IIE-20 / SS-IIE-20 L SS-II E-30
Mirror type  QU  SI  QU  QU [D] SI  SC 
Acceleration time (ms)  0.70 0.61 0.90 0.72 0.84 0.52
writing speed (cps) 1, 2 350 350 - - - -
Positioning speed (m/s) 6.0 6.0 4.0 5.5 5.0 6.0

1. With F-Theta Lens f=160 mm / field size 110 mm x 110 mm.
2. Single-stroke font with 1 mm height.


※製品仕様は改良等により、予告なしに変更となる場合あります。
 メーカーHPにアップロードされている最新の仕様も併せて必ずご確認ください。

The SUPERSCAN IIE is ideally suited for these applications:

  • Marking
  • Ablation
  • Welding
  • ITO Structuring
  • Ag Patterning

SUPERSCAN II - High speed scan heads

品名 型番 数量
2Dガルバノスキャナ
F-theta:10.6µm, f=100, Field size approx 70×70mm
SUPERSCAN-IIE-HS-15 [C] 1
2Dガルバノスキャナ
F-theta:1064nm, f=100.3, Field size approx 24×24mm
SUPERSCAN-IIE-20 [Y] 1
コントロールカード
Software:weldMARK 2.0 / 3.0
SP-ICE-1 PRO 1

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