高速リニアレンズチェンジャー LLC6™
６レンズ装着で高速レンズ切替えが可能です。
ＴＦＴアレイやフォトマスク検査・リペアなど、対物レンズ倍率切り替え頻度の高い工程に威力を発揮する、高速対物レンズポジションチェンジャーです。
- #1→#6で0.5秒以下の高速レンズ切り替えを実現
- レンズ位置精度 ±0.1µｍ以下
- クラス100クリーンルーム対応
| Maximum number of lenses | 6 | ||
| Lens spacing centre to centre | 38 mm | ||
| Lens change time | 1 <--> 6 | 0.5 sec. | Measured on turret populated with lenses |
| 1 <--> 5 | 0.4 sec. | ||
| 1 <--> 4 | 0.4 sec. | ||
| 1 <--> 3 | 0.3 sec. | ||
| 1 <--> 2 | 0.2 sec. | ||
| Motor type | Shaft linear motor | No iron core thus zero cogging operation; no contact between forcer and shaft |
|
| Motor weight | 0.6 kg | Shaft + forcer | |
| Motion actuation implementation | Fixed forcer & fixed encoder head | No cable track required | |
| Encoder | Linear encoder | 10 µm groove pitch 0.1 µm resolution with interpolation |
|
| Servo type | Digitally controlled linear servo | Guaranteed not to oscillate around destination point |
|
| Servo positioning accuracy | ±0.1 µm | Supports lens change while the gantry is accelerating/ decelerating | |
| Bearings | High precision cross-roller | Bearings are preloaded to eliminate lateral play |
|
| Weight excluding lenses | - 3 kg | ||
| Dimensions | L 578.58 mm W 101.29 mm H 85 mm |
||
| Compliance | Clean room class 10 | SEMI | |
| Electrical | |||
| Supply voltage | 48 Volts (90 Volts) | ||
| Peak current | 2.5 Amps | ||
- 高速リニアレンズチェンジャー LLC6
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