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SUPERSCAN IIE 2Dガルバノスキャナデモ機有

SUPERSCAN IIE 2Dガルバノスキャナ

The innovative thermal management and modular design make the SUPERSCAN IIE the perfect deflection unit for the demanding laser applications, it offers 50% better long-term drift performance to previous models and the long term-drift can even be further minimized by adding water tempering.

The SUPERSCAN IIE scan heads provide two types of water-tempering connections for the electronics and galvanometer scanners, straight [W] connectors and 90° [W2] connectors along with air-cooling [A] of the deflection mirrors. This ensures constant working conditions and excellent long term stability, thus guaranteeing reliable operation even in high-laser-power applications.

Auto calibration option [K] available for all the SUPERSCAN IIE models with reference sensors for automatic drift compensation which ensures process stability.

BE and SC mirrors allow for higher speed peformance due to the lightweight mirror substrates and optimized mirror mounts.


特長

  • Lowest drift values through twin-shell design
  • Laser power capabilities up to 5 kW*
  • Improved drift values with enhanced model
  • Minimal drift with Water tempering option
  • Available apertures: 10, 12, 15, 20, 30 mm

インターフェイス

The deflection units are compatible to the XY2-100 standard protocol.
They can be digitally controlled by a control card, such as the SP-ICE-1 PCI PRO or via an analog current or voltage interface.


ミラーとレンズ

Scan mirrors and objectives with optimized mounts are available for all typical laser types,
wavelengths, power densities, focal lengths and working fields. Customer specific configurations are also possible.

General Specifications

Power supply Voltage ±15 to ±18 V
Current 3 A, RMS, max. 10 A
Ripple / Noise Max. 200 mVpp, @ 20 MHz bandwidth
Interface signals Digital XY2-100 Protocol
Ambient temperature +15 to +35 °C
Storage temperature -10 to +60 °C
Humidity ≤ 80 % non-condensing
Typical deflection (optical) ±0.393 rad

(1) Drift per axis.
(2) After warming-up, variations of ambient temperature < 1K, variations of cooling water 1K <

Resolution optically 12 µrad
Repeatability (RMS) 2 µrad
Max. Gaindrift (1) < 15 ppm/K
Max. Offsetdrift (1) < 10 µrad/K
Long-term Drift (1, 2) < 150 µrad
Long-term Drift with
water tempering [W] [W2] (1, 2)

< 100 µrad
Position noise (RMS) < 10 µrad

Aperture Dependent Specifications - Mechanical Data

Deflection unit SUPERSCAN
IIE-10
SUPERSCAN
IIE-12
SUPERSCAN
IIE-15
SUPERSCAN
IIE-20
SUPERSCAN
IIE-20 L
SUPERSCAN
IIE-30
Input aperture (mm) 10.0 12.0 15.0 20.0 20.0  30.0
Beam displacement
(mm)
12.4 14.0 18.55 / 18.05 (1) 26.28 / 25.63 (1) 26.28 / 25.63 (1) 35.82 / 35.38 (1)
Weight (without
objective) (kg)
approx. 3.3 approx. 3.3 approx. 3.3 approx. 3.3 approx. 5.9 approx. 5.9
Dimension (LxWxH)
(mm)
170 x 125 x 117.5 170 x 125 x 117.5 170 x 125 x 117.5 170 x 125 x 117.5 203 x 159 x 150/160.5 (2) 203 x 159 x 150/160.5 (2)

(1) Specification for fused Silica mirrors.
(2) AXIALSCAN variation only, additional output plate for protection window.


Aperture Dependent Specifications - Mirror Variations

deflection unit  SUPERSCAN IIE-10  SUPERSCAN IIE-12  SUPERSCAN IIE-15  SUPERSCAN IIE-20  SUPERSCAN IIE-30 
355 nm  SI  SI  QU, SI  QU 
532 nm  SI  SI  QU, SI, BE  QU, SI, BE  QU 
780-980 nm + AL    QU  QU  QU 
1,064 nm  SI  SI  QU, SI, BE  QU, SI, BE  QU, SI, SC, BE 
900-1,100 nm + AL      SC 
1,060-1,080 nm    QU, SC 
10,600 nm  SI  SI  SI, BE  SI, BE  SI, SC, BE 

Standard: QU = Quarz (Fused Silica), SI = Silicium
High Speed: SC = Silicium Carbid, BE = Beryllium


Type Dependent Specifications - Dynamic Data

deflection unit  SUPERSCAN II E-10  SUPERSCAN IIE-12  SUPERSCAN II E-15
Mirror type  SI  SI  QU  BE 
Acceleration time (ms)  ≦ 0.19  ≦ 0.25  ≦ 0.36  ≦ 0.24 
writing speed (cps) (1, 2)  800 650 435 615
Positioning speed (m/s) (1)  10.0 9.0 6.0 9.0
deflection unit  SUPERSCAN IIE-20 / SUPERSCAN IIE-20 L SUPERSCAN II E-30
Mirror type  QU  SI  BE  QU  SI  SC  BE 
Acceleration time (ms)  ≦ 0.58  ≦ 0.61  ≦ 0.40  ≦ 0.90  ≦ 0.84  ≦ 0.52  ≦ 0.50 
writing speed (cps) (1, 2)  350 350 450 - - - -
Positioning speed (m/s) (1)  6.0 6.0 7.0 4.0 5.0 6.0 6.0

(1) With F-Theta Lens f=160 mm / field size 110 mm x 110 mm.
(2) Single-stroke font with 1 mm height.

※製品仕様は改良等により、予告なしに変更となる場合あります。
 メーカーHPにアップロードされている最新の仕様も併せて必ずご確認ください。

The SUPERSCAN IIE is ideally suited for these applications:

  • Marking
  • Ablation
  • Welding
  • ITO Structuring
  • Ag Patterning

SUPERSCAN II - High speed scan heads

品名 型番 数量
2Dガルバノスキャナ
F-theta:10.6µm, f=100, Field size approx 70×70mm
SUPERSCAN-IIE-HS-15 [C] 1
2Dガルバノスキャナ
F-theta:1064nm, f=100.3, Field size approx 24×24mm
SUPERSCAN-IIE-20 [Y] 1
コントロールカード
Software:weldMARK 2.0 / 3.0
SP-ICE-1 PRO 1

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